Vacuum adsorption chuck vacuum constant temperature heating chuck

Vacuum Chuck

• Stainless steel chuck table size 4", flatness 5μm, with 3 vacuum adsorption holes

• Stainless steel chuck table sizes 6", 8", 12", flatness 5μm, with 4 vacuum adsorption holes

• Silent oil-free air pump, 7 L/min, capable of continuous operation

Constant Temperature Vacuum Chuck

• Aluminum alloy chuck table sizes 4", 6", 8", flatness 5μm.

• With 3-4 vacuum adsorption holes

• Silent oil-free air pump, 7 L/min, capable of continuous operation

• Capable of water or gas circulation cooling

• Includes heating function, maximum heating temperature 300°C, temperature control accuracy ±1°C, display accuracy 0.1°C,

Temperature uniformity within effective area ±5°C.

• Optional refrigeration function, minimum temperature -130°C (under vacuum environment).

• Equipped with rapid cooling function, configured with water cooling interface, can connect to a chiller for fast cooling.